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Radio Frequency Magnetron Sputtering of GdBa2Cu3O7−δ/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates
 

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7−δ/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates

Article DOI: 10.3791/58069-v • 06:49 min • April 12th, 2019
April 12th, 2019 •
1,2, 1,2, 1, 2, 2, 2, 1, 1,3, 1,4, 3, 3
1Department of Physics, Mathematics, Shanghai Key Laboratory of Materials Protection and Advanced Materials in Electric Power, Shanghai University of Electric Power, 2Key Laboratory of Artificial Structure and Quantum Control, Ministry of Education, Department of Physics, Shanghai Jiao Tong University, 3Shanghai Institute of Space Power-sources, 4Shanghai Key Laboratory of High Temperature Superconductors, Shanghai University

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Summary
Automatic Translation

Here, we present a protocol to grow LSMO nanoparticles and (Gd) BCO films on (001) SrTiO3 (STO) single-crystal substrates by radio frequency (RF)-sputtering.

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Radio Frequency Magnetron Sputtering GdBa2Cu3O7&8722; La0.67Sr0.33MnO3 Quasi-bilayer Films SrTiO3 Single-crystal Substrates LSMO Nanoparticles Superconducting GBCO Film Vacuum Chamber Film Deposition Nanoparticle Growth Metal Film Deposition Metal Nanoparticle Deposition Vacuum Equipment Film Growth Technology Isopropanol Deionized Water Ultrasonic Bath Nitrogen Drying Substrate Holders Silver Powder Conductive Glue Magnetron Injection Gun Resistance Testing Vacuum Pumping
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