Waiting
Procesando inicio de sesión ...

Trial ends in Request Full Access Tell Your Colleague About Jove
Journal / Engineering / Fabrication of Nanoheight Channels Incorporating…
JoVE Journal
Engineering

Se requiere una suscripción a JoVE para ver este contenido. Inicie sesión o comience su prueba gratuita.

JoVE Journal Engineering
Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
 

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

Article DOI: 10.3791/60648-v • 07:23 min • February 5th, 2020
February 5th, 2020 •
1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine, University of California San Diego

Capítulos

Resumen
Automatic Translation

We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.

Tags

Nanoheight Channels Surface Acoustic Wave Actuation Lithium Niobate Acoustic Nanofluidics Fabrication Method Room Temperature Plasma Surface Activated Multilayer Bonding Single Crystal Lithium Niobate Silicon Dioxide Oxides Cleaning Plasma Surface Activation Bonding Failure Nano-height Channel Formation Nano-height Channel Mask Wafer Inscribed Pattern Sputter Deposition System Chromium Deposition Sacrificial Mask Acetone Sonication Deionized Water Rinse
Read Article

Get cutting-edge science videos from JoVE sent straight to your inbox every month.

Waiting X
Simple Hit Counter