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Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
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Ingénierie
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Journal JoVE Ingénierie
Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

DOI:
10.3791/56383-v

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06:30 min

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August 29, 2017

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, , ,
1School of Electrical Engineering and Computer Science,Gwangju Institute of Science and Technology, 2Department of Robotics Engineering,Daegu Gyeongbuk Institute of Science and Technology

Chapitres

  • 00:05Titre
  • 00:56Substrate Preparation and Oblique Angle Deposition of Germanium
  • 03:23Oblique Angle Deposition of Ge on Large Substrates
  • 04:50Results: Ultra-thin Color Films
  • 05:40Conclusion

Summary

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We present a detailed method for fabricating ultra-thin color films with improved characteristics for optical coatings. The oblique angle deposition technique using an electron beam evaporator allows improved color tunability and purity. Fabricated films of Ge and Au on Si substrates were analyzed by reflectance measurements and color information conversion.

Tags

Ultra-thin Color FilmsOblique Angle DepositionPorosity ControlThin Film ColorationOptical Resonance ApplicationsNanofabricationGermanium DepositionTitanium Adhesion LayerGold Reflection Layer

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