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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Chimie
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Journal JoVE Chimie
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

DOI:
10.3791/61065-v

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07:10 min

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April 29, 2020

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, , , ,
1Łukasiewicz Research Network-Institute of Electronic Materials Technology

Chapitres

  • 00:00Introduction
  • 00:57Defect Selective Etching
  • 02:09Scanning Electron Microscopy
  • 02:50Secondary Ion Mass Spectrometry
  • 05:34Results: Oxygen Counts in a Cuboid
  • 06:29Conclusion

Summary

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Traduction automatique

The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.

Tags

Keywords: 3D Depth ProfileSegregated ImpuritiesSecondary Ion Mass SpectrometrySemiconductor TechnologyStructural DefectsEutectic MixtureDefect-selective EtchingGallium NitrideScanning Electron MicroscopySIMS Calibration

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