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Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

May 17, 2024
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Summary

The manuscript describes a protocol for radio frequency magnetron sputtering of Bi2Te3 and Sb2Te3 thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.