National Institute for Materials Science (NIMS) 1 article published in JoVE Chemistry Low-energy Cathodoluminescence for (Oxy)Nitride Phosphors Yujin Cho1,3, Benjamin Dierre2, Takashi Sekiguchi3, Takayuki Suehiro4, Kohsei Takahashi4, Takashi Takeda4, Rong-Jun Xie4, Yoshinobu Yamamoto4, Naoto Hirosaki4 1Graduate School of Pure and Applied Science, University of Tsukuba, 2CNRS — Saint-Gobain, UMI 3629, Laboratory for Innovative Key Materials and Structures (LINK), 3Nano Device Characterization Group, National Institute for Materials Science (NIMS), 4Sialon Unit, National Institute for Materials Science (NIMS) An excellent chemical and luminescence stabilities of (oxy)nitride phosphors present it as an promising alternative to currently used sulfide and oxide phosphors. In this paper, we present the way to investigate its local luminescence properties using low-energy cathodoluminescence (CL).