Max Planck Institut fur Mikrostrukturphysik 1 article published in JoVE Engineering Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures Diogo Castro Vaz1, Edouard Lesne1,2, Anke Sander1, Hiroshi Naganuma1,3, Eric Jacquet1, Jacobo Santamaria1,4, Agnès Barthélémy1, Manuel Bibes1 1Unité Mixte de Physique CNRS/Thales, Université Paris-Saclay, 2Max Planck Institut für Mikrostrukturphysik, 3Department of Applied Physics, Tohoku University, 4Instituto de Magnetismo Aplicado, Universidad Complutense de Madrid We fabricate metal/LaAlO3/SrTiO3 heterostructures using a combination of pulsed laser deposition and in situ magnetron sputtering. Through magnetotransport and in situ X-ray photoelectron spectroscopy experiments, we investigate the interplay between electrostatic and chemical phenomena of the quasi two-dimensional electron gas formed in this system.