Mercyhurst University 1 article published in JoVE Engineering Scanning-probe Single-electron Capacitance Spectroscopy Kathleen A. Walsh1, Megan E. Romanowich1, Morewell Gasseller1,2, Irma Kuljanishvili1,3, Raymond Ashoori4, Stuart Tessmer1 1Department of Physics and Astronomy, Michigan State University, 2Department of Chemistry & Biochemistry/Physics, Mercyhurst University, 3Department of Physics, Saint Louis University, 4Department of Physics, Massachusetts Institute of Technology Scanning-probe single-electron capacitance spectroscopy facilitates the study of single-electron motion in localized subsurface regions. A sensitive charge-detection circuit is incorporated into a cryogenic scanning probe microscope to investigate small systems of dopant atoms beneath the surface of semiconductor samples.