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Fabrication and Testing of Photonic Thermometers
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Fabrication and Testing of Photonic Thermometers

Fabrication and Testing of Photonic Thermometers

DOI:
10.3791/55807-v

•

08:44 min

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October 24, 2018

•

,
1Joint Quantum Institute,University of Maryland, 2Physical Measurement Laboratory,National Institute of Standards and Technology

Capitoli

  • 00:04Titolo
  • 01:16Device Fabrication
  • 02:58Photonic Chip Alignment
  • 04:28Photonic Chip Testing
  • 05:00Bonding of the Optical Fibers
  • 05:49Packaging of Photonic Thermometer and Temperature Measurement
  • 06:47Results: Temperature Response of Photonic Sensor
  • 07:39Conclusion

Summary

Traduzione automatica

Traduzione automatica

We describe the process of fabrication and testing of photonic thermometers.

Tags

Photonic ThermometersPhotonic ThermometryFrequency-based MeasurementsTemperature MetrologyOptomechanical Temperature StandardsSOI Wafer FabricationE-beam LithographyICP RIE EtchingPhotonic Chip DicingV-groove Array Alignment

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