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连续湿法刻蚀法制作不同几何断面烷微流控通道的一步法

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One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes

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连续湿法刻蚀法制作不同几何断面烷微流控通道的一步法

DOI:

10.3791/57868-v

•

08:31 min

•

September 13, 2018

•

Chien-Kai Wang², Wei-Hao Liao, Hsiao-Mei Wu, Yi-Chung Tung³

¹Research Center for Applied Sciences,Academia Sinica, ²Department of Civil Engineering,Tamkang University, ³College of Engineering,Chang Gung University

Capitoli

00:04Titolo
01:12Fabrication of Polydimethylsiloxane (PDMS) Channel Layouts
03:20Experimental Characterization of PDMS Wet Etching
04:36PDMS Sequential Wet Etching for Microfluidic Channels of a Cross-shaped Cross-section
05:50Fabrication and Characterization of a Microfluidic Mixer with Different Channel Sections
07:08Results: Fabrication of Microfluidic Channels with Different Geometric Sections
07:49Conclusion

Summary

Traduzione automatica

对烷微流控器件中嵌入的非矩形截面通道的制作, 有几种方法可供选择。其中大部分涉及多步骤制造和广泛的对准。本文介绍了用烷连续湿法刻蚀法制作不同几何剖面微流控通道的一步法。

Tags

Microfluidic Channels Polydimethylsiloxane (PDMS)One-step Fabrication Sequential Wet Etching Geometric Cross Sections Channel Fabrication Microfluidic Device Manufacturing Complex Microfluidic Systems Master Mold PDMS Molding Oxygen Plasma Treatment

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