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用于密集激光辐照实验的微制造目标的自动交付

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Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments

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用于密集激光辐照实验的微制造目标的自动交付

DOI:

10.3791/61056-v

•

06:40 min

•

January 28, 2021

•

Yonatan Gershuni², Michal Elkind², Dolev Roitman², Itamar Cohen², Aviad Tsabary², Deep Sarkar², Ishay Pomerantz²

¹The School of Physics and Astronomy,Tel Aviv University, ²Tel Aviv University Center for Light-Matter Interaction

Capitoli

00:05Introduction
00:46Target Fabrication
03:32Target Alignment
04:32Irradiation Sequence and Automated Target Positioning
05:15Risultati
06:13Conclusion

Summary

Traduzione automatica

提出了一种用高强度激光脉冲对薄金箔进行自动照射的协议。该协议包括微加工目标制造过程的分步描述，以及如何以 0.2 Hz 速率将目标带到激光聚焦的详细指南。

Tags

Keywords: Microfabricated Targets Intense Laser Irradiation Automated Target Delivery Wafer Fabrication Silicon Nitride Potassium Hydroxide Reactive Ion Etching Physical Vapor Deposition Gold Sputtering

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