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浓稠钇铁石榴石薄膜的形成使用气溶胶沉积

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Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

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浓稠钇铁石榴石薄膜的形成使用气溶胶沉积

DOI:

10.3791/52843-v

•

10:52 min

•

May 15, 2015

•

Scooter D. Johnson, Evan R. Glaser, Fritz J. Kub, Charles R. Eddy, Jr.

¹Power Electronics Branch,Naval Research Laboratory, ²Physics of Electronic Materials Branch,Naval Research Laboratory

Chapters

00:05Title
01:42Aerosol Deposition Equipment and Experiment Preparation
04:51Establishing the Pressure Gradient and Collecting Data
08:44Results: Morphology and Properties of an Aerosol Deposition Film of YIG on a Sapphire Substrate
10:26Conclusion

Summary

자동 번역

本报告描述了使用定制系统来在RT执行的钇铁石榴石厚膜的气溶胶沉积在蓝宝石衬底。使用扫描电子显微镜，轮廓，和铁磁谐振得到的技术的功能的代表性概述淀积膜的特征在于。

Tags

Keywords: Aerosol Deposition Yttrium Iron Garnet Thick Film Deposition High-density Films Ferromagnetic Resonance Scanning Electron Microscopy Film Characterization

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