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Chapters
- 00:05Title
- 02:15Scanning Tunneling Microscopy and Lithography
- 05:42Atomic Layer Deposition
- 06:37Atomic Force Microscopy and Reactive Ion Etching
- 08:47Scanning Electron Microscopy
- 09:58Results: Surface Patterning with Selective Atomic Layer Deposition and Reactive Ion Etching
- 11:39Conclusion
We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.
