Journal
/
/
Fabricação de Baixa Temperatura de Nanotubos de Carbono Vertical Interconexões Compatível com Semiconductor Tecnologia
JoVE 신문
공학
JoVE 비디오를 활용하시려면 도서관을 통한 기관 구독이 필요합니다.  전체 비디오를 보시려면 로그인하거나 무료 트라이얼을 시작하세요.
JoVE 신문 공학
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
DOI:

09:20 min

December 07, 2015

,

Chapters

  • 00:05Title
  • 00:46Bottom Metal and Interlayer Dielectric Deposition
  • 03:23Catalyst Deposition and CNT Growth
  • 05:07Topside Metallization
  • 07:17Results: Characterization of Vertically-aligned Carbon Nanotubes
  • 08:41Conclusion

Summary

자동 번역

A method for the growth of low temperature vertically-aligned carbon nanotubes, and the subsequent fabrication of vertical interconnect electrical test structures using semiconductor fabrication is presented.

Related Videos

Read Article