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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

DOI:
10.3791/53543-v

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07:37 min

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December 21, 2015

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,
1Institut des Nanotechnologies de Lyon,CNRS-École Centrale de Lyon, 2Institut de Ciència de Materials de Barcelona,Consejo Superior de Investigaciones Científicas

Chapters

  • 00:05Title
  • 01:11Preparation of the Sol
  • 02:43Gel Film Deposition on Si(100) Substrates
  • 04:04Gel Film Crystallization by Thermal Treatment
  • 04:55Results: Characterization of Macroporous Epitaxial Quartz Films
  • 06:30Conclusion

Summary

자동 번역

자동 번역

A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.

Tags

Keywords: MacroporousEpitaxialQuartzFilmsSiliconChemical Solution DepositionSol-gelTetraethyl OrthosilicateStrontiumCTABMesoporousThermal TreatmentCrystallizationEpitaxial Growth

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