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Chapters
- 00:05Title
- 01:05Preparations
- 03:52Data Acquisition
- 05:38Data Analysis for Static Measurements
- 06:40Sample Preparation and Data Analysis for Dynamic Measurements
- 07:42Results: CDHM Compared to Atomic Force Microscopy and Other Results
- 09:17Conclusion
Tags
Compact Lens-less Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationOptical Full-field MeasurementsComputational TechniquesExperimental TechniquesSemiconductor IndustryMechanical PropertiesManufacturing StagesNon-contactReal-timeHigh-resolution3D MapReflective ObjectWafer InspectionOptics Reference TestingTransparent GeometryMicro-optics InspectionDiffractive Optics InspectionBioimagingCompact Digital Holographic Microscope (CDHM)Silicon Wafer CharacterizationGold Electrodes
