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1Biohybrid Materials, Department of Bioproducts and Biosystems,Aalto University, 2University of Jyväskylä, Nanoscience Center, Department of Biological and Environmental Science,University of Jyväskylä, 3University of Jyväskylä, Nanoscience Center, Department of Physics,University of Jyväskylä, 4HYBER Center of Excellence, Department of Applied Physics,Aalto University
Chapters
- 00:04Title
- 01:02DNA Origami Assembly
- 01:34Substrate Preparation
- 02:09Amorphous Silicon (a-Si) Layer Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Oxygen Plasma Treatment
- 02:49DNA Origami Deposition
- 03:44Silicon Dioxide (SiO2) Mask Growth
- 04:38Reactive Ion Etching (RIE)
- 05:25Physical Vapor Deposition (PVD)
- 06:35Hydrofluoric Acid (HF) Liftoff
- 07:05Remaining a-Si RIE
- 07:38Results: Representative Bowtie DNA Origami Imaging and Functional Analyses
- 08:15Conclusion
