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JoVE Journal Engineering
Fabricage van Nanoheight Channels waarin Surface Acoustic Wave Actuation via Lithium Niobate voor Akoestische Nanofluidics
 
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Fabricage van Nanoheight Channels waarin Surface Acoustic Wave Actuation via Lithium Niobate voor Akoestische Nanofluidics

Article DOI: 10.3791/60648-v • 07:23 min • February 5th, 2020
February 5th, 2020 •
1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine, University of California San Diego

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We demonstreren fabricage van nanohoogtekanalen met de integratie van oppervlakte akoestische golfactuatie-apparaten op lithium niobate voor akoestische nanofluidica via liftoff fotolithografie, nano-diepte reactieve ionets en kamertemperatuurplasma oppervlakte-geactiveerde meerlaagse binding van enkelkristallithium niobaat, een proces dat ook nuttig is voor het plakken van lithiumniobate aan oxiden.

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Engineering acoustofluidics nanofluidics nanofabrication oppervlakte akoestische golven kamertemperatuur binding lithium niobate plasma geactiveerdbinding
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