Micropunching为微型和亚微米模式聚合物基板上生成的光刻
Summary
开发一个micropunching光刻方法产生微观和亚微米图案，顶部，侧壁和底部表面的聚合物基板。它克服了图案化导电聚合物和产生侧壁模式的障碍。这种方法允许多个功能快速制作和侵略性的化学自由。
Abstract
导电聚合物已引起高度重视，因为高电导率掺杂聚乙炔的发现在1977年1。他们提供的优势，重量轻，易于剪裁的物业和广泛的应用2,3。由于导电聚合物对环境条件的敏感性（如空气，氧气，水分，高温和化学解决方案），平版印刷技术呈现显着的技术挑战，这些材料4时。例如，当前的光刻方法，如紫外线（紫外线），是不适合图案的导电聚合物，由于潮湿和/或干蚀刻方法在这些过程的参与。此外，目前微/纳米系统主要有平面形式5,6。是建立在另一层制作功能表面层结构。这些结构的多层次堆叠在一起，形成众多设备一个共同的基板。微观结构的侧壁表面没有被用于构建设备。另一方面，侧壁模式可以使用，例如，建立3-D电路，修改流体通道和纳米线和纳米管的水平直接增长。
一个macropunching方法已广泛应用于制造业，创造了一百多年的钣金macropatterns。这种方法的启发，我们已经开发了1 micropunching光刻法（MPL）的图案，以克服的障碍，导电聚合物和生成侧壁模式。对MPL像macropunching方法，还包括两个操作（ 图1）：（一）切割;及（ii）绘图。 “切割”操作模式3导电聚合物，聚吡咯，聚（3,4 – ethylenedioxythiophen） -聚（4 styrenesulphonate）（PEDOT薄膜）和聚苯胺（PANI）。也有人雇用创建阿尔微观7。湿度8，8，化学和葡萄糖传感器9已被用作制造导电聚合物的微观结构。已采用铝结合的微观结构和导电聚合物电容和各种异质9,10,11编造。 “切割”操作也适用于生成亚微米级模式，如100 – 500纳米宽的聚吡咯生产线以及100纳米范围内的金线。 “图纸”操作受聘为两个应用程序：（一）生产高密度聚乙烯（HDPE）可以用来建立三维微12,13,14渠道凹侧壁模式，及（ii）制备聚二甲基硅氧烷（PDMS）micropillars高密度聚乙烯基材上，以增加接触角的通道15。
Protocol
Discussion
故障排除信息：临界点，就产生导电聚合物和金属使用“切割”操作单和多层微图案：（1）压印温度，确保产生最佳效果的聚甲基丙烯酸甲酯的中间层的流动性。明智的做法是在下限范围内开始，并逐渐增加温度，如果没有达到预期的效果。温度过高可能会导致导电聚合物层，以改变其化学和/或电气性能。 （2）如果压印力过高，可能会导致硅模具，以打击在压印;而低力量可能导?…
Declarações
The authors have nothing to disclose.
Acknowledgements
通过NSFDMI-0508454，国家科学基金会/ LEQSF（2006）镑-53，NSF的CMMI-0811888，和NSF的CMMI-0900595赠款，支持这项工作的一部分。
Materials
| Name of the reagent | Company | Catalogue number | Comments |
| PMMA | Sigma-Aldrich Co. | 495C9 | The solvent is cholorobenzene. Handle PMMA solution under a fume hood with adequate ventilation. Do not breathe the vapor. Refer to MSDS for safe handling instructions. |
| PPy | Sigma-Aldrich Co. | — | 5% by weight in water. Used as received. |
| PEDOT-PSS | H. C. Starck Co. | Baytron P HC V4 | Proprietary solvent. Used as received. |
| SPANI | Sigma-Aldrich Co. | — | Water soluble form. Used as received. |
| Hot embossing machine | JenoptikMikrotechnik Co. | HEX 01/LT | |
| Sputter machine | Cressington Co. | 208HR | |
| FIB machine | Zeiss Co. | FIB Crossbeam 1540 XB | |
| Spin coater | Headway Reseach Co. | PWM32-PS-R790 Spinner System | |
| RIE machine | Technics MicroRIE Co. | — | |
| Photoresist | Shipley Co. | S1813 | |
| PDMS | Dow Corning | Sylgard 184 Silicone elastomer kit | |
| HDPE sheet | US Plastic Incorporate | — | |
| PMMA sheet | Cyro Co. | — | |
| Double-sided adhesive tape | Scotch Co. | — | |
| Single-sided tape | Delphon Co. | Ultratape # 1310 | |
| Glass micropipettes | FHC Co. | 30-30-1 | |
| Clip | Office Depot Co. | Bulldog clip | |
| Humidifier | Vicks Co. | Filter free humidifier |
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