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Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

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Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

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Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

DOI:

10.3791/201298-v

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03:39 min

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May 17, 2024

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Nurfarhana Ahmad Musri, Yoganash Putthisigamany, Puvaneswaran Chelvanathan, Norasikin Ahmad Ludin, Nadhrah Md Yatim, Ubaidah Syafiq

¹Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology,Universiti Sains Islam Malaysia

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Radio Frequency Magnetron Sputtering Bi2Te3 Sb2Te3 Thermoelectric Thin Films Glass Substrates Aluminum Shield Magnetron Holder Vacuum Chamber Pressure Gauge Cooler System Argon Gas Flow Rotation Speed Automatic Matching Network Controller Radio Frequency Power Supply Plasma

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