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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

DOI:
10.3791/50297-v

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10:27 min

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February 27, 2013

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, , , ,
1Department of Energy and NEMAS – Center for NanoEngineered Materials and Surfaces,Politecnico di Milano, 2Center for Nano Science and Technology,Instituto Italiano di Tecnologia

Capítulos

  • 00:05Título
  • 01:30Substrate Preparation
  • 02:01Laser Alignment and Selection of Laser Parameters
  • 03:33Target Alignment, Pre-ablation and Data Collection for Plasma Plume Length Determination
  • 04:51Calibration of the Film Thickness
  • 05:58Deposition of Compact AZO Films
  • 07:25Deposition of Hierarchically Structured AZO Films
  • 08:08Results: Compact and Forest-like AZO Films and Their Properties
  • 09:39Conclusion

Summary

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We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

Tags

Pulsed Laser DepositionTransparent Conducting OxidesAl-doped ZnONanostructured FilmsHierarchical StructuresLight ScatteringLight TrappingThin FilmsMetal OxidesPhotovoltaics

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