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Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application
 

Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

Article DOI: 10.3791/53097-v • 08:18 min • October 3rd, 2015
October 3rd, 2015 •
1, 1
1Institute of Manufacturing Technology and Department of Mechanical Engineering, National Taipei University of Technology (TAIPEI TECH)

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Resumo
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We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.

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Keywords: ZnO Thin Film PECVD C-axis Orientation UV Photodetector XRD PL FE-SEM Pt Interdigitated Electrodes Ohmic Contact
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