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Synthese und Charakterisierung von Hoch c-Achsen-ZnO-Dünnfilm durch Plasma Enhanced Chemical Vapor Deposition-System und seine UV-Photodetektor Anwendungs
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Capítulos
- 00:05Título
- 02:07Substrate Preparation and Cleaning
- 02:37PECVD Chamber Preparation and Synthesis of ZnO Thin Films
- 05:10RTA Process
- 05:58Results: Synthesis and Characterization of ZnO Thin Films
- 07:30Conclusion
We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.
