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用斜角沉积法制备高吸收介质的超薄彩色薄膜

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Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

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用斜角沉积法制备高吸收介质的超薄彩色薄膜

DOI:

10.3791/56383-v

•

06:30 min

•

August 29, 2017

•

Young Jin Yoo, Gil Ju Lee, Kyung-In Jang, Young Min Song

¹School of Electrical Engineering and Computer Science,Gwangju Institute of Science and Technology, ²Department of Robotics Engineering,Daegu Gyeongbuk Institute of Science and Technology

Capítulos

00:05Título
00:56Substrate Preparation and Oblique Angle Deposition of Germanium
03:23Oblique Angle Deposition of Ge on Large Substrates
04:50Results: Ultra-thin Color Films
05:40Conclusion

Summary

Tadução automática

本文介绍了一种改进的光学涂层超薄型彩色薄膜的制备方法。采用电子束蒸发器的斜角沉积技术可提高色调谐和纯度。利用反射测量和颜色信息转换, 分析了锗和 Au 在 Si 衬底上的制备膜。

Tags

Keywords: Ultra-thin Color Films Oblique Angle Deposition Porosity Control Thin Film Coloration Optical Resonance Applications Nanofabrication Germanium Deposition Titanium Adhesion Layer Gold Reflection Layer

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