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连续湿法刻蚀法制作不同几何断面烷微流控通道的一步法
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One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes
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连续湿法刻蚀法制作不同几何断面烷微流控通道的一步法

DOI:
10.3791/57868-v

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08:31 min

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September 13, 2018

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, , ,
1Research Center for Applied Sciences,Academia Sinica, 2Department of Civil Engineering,Tamkang University, 3College of Engineering,Chang Gung University

Capítulos

  • 00:04Título
  • 01:12Fabrication of Polydimethylsiloxane (PDMS) Channel Layouts
  • 03:20Experimental Characterization of PDMS Wet Etching
  • 04:36PDMS Sequential Wet Etching for Microfluidic Channels of a Cross-shaped Cross-section
  • 05:50Fabrication and Characterization of a Microfluidic Mixer with Different Channel Sections
  • 07:08Results: Fabrication of Microfluidic Channels with Different Geometric Sections
  • 07:49Conclusion

Summary

Tadução automática

Tadução automática

对烷微流控器件中嵌入的非矩形截面通道的制作, 有几种方法可供选择。其中大部分涉及多步骤制造和广泛的对准。本文介绍了用烷连续湿法刻蚀法制作不同几何剖面微流控通道的一步法。

Tags

Microfluidic ChannelsPolydimethylsiloxane (PDMS)One-step FabricationSequential Wet EtchingGeometric Cross SectionsChannel FabricationMicrofluidic Device ManufacturingComplex Microfluidic SystemsMaster MoldPDMS MoldingOxygen Plasma Treatment

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