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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
 

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

Article DOI: 10.3791/60648-v • 07:23 min • February 5th, 2020
February 5th, 2020 •
1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine, University of California San Diego

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We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.

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Keywords: Nanoheight Channels Surface Acoustic Wave Lithium Niobate Acoustic Nanofluidics Nanofabrication Plasma Bonding Photolithography Reactive Ion Etching Chromium Etching Solvent Cleaning
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