/

/

Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

/

무선 주파수 마그네트론 스퍼터링 기법을 이용한 Bi2 Te₃ 및 Sb₂Te₃ 열전 박막 제작

JoVE Journal
Engenharia

É necessária uma assinatura da JoVE para visualizar este conteúdo. Faça login ou comece sua avaliação gratuita.

JoVE Journal Engenharia

Fabrication of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique

Please note that all translations are automatically generated. Click here for the English version.

무선 주파수 마그네트론 스퍼터링 기법을 이용한 Bi2 Te₃ 및 Sb₂Te₃ 열전 박막 제작

Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

DOI:

10.3791/66248-v

•

00:45 min

•

May 17, 2024

•

Nurfarhana Ahmad Musri, Yoganash Putthisigamany, Puvaneswaran Chelvanathan, Norasikin Ahmad Ludin, Nadhrah Md Yatim, Ubaidah Syafiq

¹Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology,Universiti Sains Islam Malaysia

Tags

Bi2Te3 Sb2Te3 Thermoelectric Thin Films Radio Frequency Magnetron Sputtering Thin Film Deposition Waste Heat Recovery Thermoelectric Generators N-type P-type

Embed

ADICIONAR À PLAYLIST

Usage Statistics

Vídeos Relacionados

무선 주파수 마그네트론 스퍼터링 기법을 이용한 Bi2 Te₃ 및 Sb₂Te₃ 열전 박막 제작

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

Read Article