¹Fraunhofer Institute for Ceramic Technologies and Systems, ²Dresden Center for Nanoanalysis, Technische Universität Dresden, ³Globalfoundries Fab 8, ⁴Globalfoundries Fab 1

¹European Commission, Joint Research Centre (JRC), The Netherlands, ²European Commission, Joint Research Centre (JRC), Italy

¹Division of Chemistry and Chemical Engineering, California Institute of Technology, ²Joint Center for Artificial Photosynthesis, California Institute of Technology, ³Advanced Light Source, Lawrence Berkeley National Laboratory, ⁴Beckman Institute, California Institute of Technology

¹Department of Chemical and Biomolecular Engineering, University of Notre Dame, ²Department of Aerospace and Mechanical Engineering, University of Notre Dame, ³Department of Chemistry and Biochemistry, Notre Dame Radiation Laboratory, University of Notre Dame

¹Department of Biophysical Chemistry, Max Planck Institute of Biophysics, ²Buchmann Institute for Molecular Life Sciences, Goethe University Frankfurt