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静電容量式圧力センサの作製

Published: March 17, 2023

doi:

Xiaowei Wang, Peijun Shangguan, Pingjie Huang, Dibo Hou

¹State Key Laboratory of Industrial Control Technology, College of Control Science and Engineering,Zhejiang University

Tags

Capacitive Pressure Sensor Soft Electrode Interdigitated Fringe Effect Platinum Silicone Flexible Foam Dielectric Layers Soft Silicone Foam 3D Printed Mold Sensitivity Fringe Field Effect Part A To Part B Weight Ratio Cyclic Pressure Loading Repeatability

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Cite This Article

Fabrication of the Capacitive Pressure Sensor. J. Vis. Exp. (Pending Publication), e200019, doi:10.3791/200019 (2023).

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