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Journal
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Engineering
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Radio Frequency Magnetron Sputtering of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films on Glass Substrates
JoVE Journal
Engineering
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JoVE Journal
Engineering
Radio Frequency Magnetron Sputtering of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films on Glass Substrates
Please note that all translations are automatically generated.
Click here for the English version.
Radio Frequency Magnetron Sputtering of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films on Glass Substrates
DOI:
10.3791/201298-v
•
03:39 min
•
May 17, 2024
•
Tags
Keywords: Radio Frequency Magnetron Sputtering
Bi2Te3
Sb2Te3
Thermoelectric Thin Films
Glass Substrates
Aluminum Shield
Magnetron Holder
Vacuum Chamber
Pressure Gauge
Cooler System
Argon Gas Flow
Rotation Speed
Automatic Matching Network Controller
Radio Frequency Power Supply
Plasma
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check_url/201298?article_type=v
Radio Frequency Magnetron Sputtering of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films on Glass Substrates
Read Article