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JoVE Journal Engineering

유리 기판에서 Bi₂te₃ 및 sb₂te₃ 열전 박막의 무선 주파수 마그네트론 스퍼터링

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유리 기판에서 Bi₂te₃ 및 sb₂te₃ 열전 박막의 무선 주파수 마그네트론 스퍼터링

Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

Article DOI: 10.3791/201298-v • 03:39 min • May 17th, 2024

May 17th, 2024 •

Nurfarhana Ahmad Musri¹, Yoganash Putthisigamany¹, Puvaneswaran Chelvanathan¹, Norasikin Ahmad Ludin¹, Nadhrah Md Yatim², Ubaidah Syafiq¹

¹Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology, Universiti Sains Islam Malaysia

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