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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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JoVE Journal Engineering
Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

DOI:
10.3791/51251-v

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11:44 min

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August 15, 2014

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, , , ,
1Department of Electrical and Computer Engineering,University of California, Davis, 2Digital Light Projection (DLP) Technology Development,Texas Instruments, 3Birck Nanotechnology Center and the Department of Electrical and Computer Engineering,Purdue University

Chapters

  • 00:05Title
  • 01:08Fabrication of Electrostatic Fringing-field Actuated (EFFA) MEMS Fixed-fixed Beams
  • 08:28Experimental Validation of Dynamic Waveform Biasing
  • 10:23Results: Measured Pull-down and Released States of a MEMS Bridge
  • 11:16Conclusion

Summary

Automatic Translation

Automatic Translation

The robust device design of fringing-field electrostatic MEMS actuators results in inherently low squeeze-film damping conditions and long settling times when performing switching operations using conventional step biasing. Real-time switching time improvement with DC-dynamic waveforms reduces the settling time of fringing-field MEMS actuators when transitioning between up-to-down and down-to-up states.

Tags

Real-time DC-dynamic BiasingSwitching Time ImprovementUnderdamped Fringing-field Electrostatic MEMS ActuatorsFast Switching OperationSettling TimeTransient Applied Bias WaveformsMechanical Quality FactorSubstrate RemovalReliabilityStictionCharge PumpCMOS ProcessingExperimental ValidationSwitching Time Improvement

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