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Journal
/
Engineering
/
Deposition of Bi
2
Te
3
and Sb
2
Te
3
Thin Films on Glass Substrates via RF Sputtering
/
Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
JoVE Journal
Engineering
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JoVE Journal
Engineering
Fabrication of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique
Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
Deposition of Bi
2
Te
3
and Sb
2
Te
3
Thin Films on Glass Substrates via RF Sputtering
DOI:
10.3791/66248-v
•
00:45 min
•
May 17, 2024
•
Nurfarhana Ahmad Musri
,
Yoganash Putthisigamany
,
Puvaneswaran Chelvanathan
,
Norasikin Ahmad Ludin
,
Nadhrah Md Yatim
,
Ubaidah Syafiq
1
Solar Energy Research Institute (SERI)
,
Universiti Kebangsaan Malaysia
,
2
Faculty of Science and Technology
,
Universiti Sains Islam Malaysia
Tags
Keywords:Bi2Te3
Sb2Te3
Thermoelectric Thin Films
Radio Frequency Magnetron Sputtering
Thin Film Deposition
Waste Heat Recovery
Thermoelectric Generators
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check_url/66248?article_type=v
Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
check_url/66248?article_type=v
Radio Frequency Magnetron Sputtering of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films on Glass Substrates
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