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A Polymer-based Piezoelectric Vibration Energy Harvester with a 3D Meshed-Core Structure
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Engineering
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A Polymer-based Piezoelectric Vibration Energy Harvester with a 3D Meshed-Core Structure

A Polymer-based Piezoelectric Vibration Energy Harvester with a 3D Meshed-Core Structure

DOI:
10.3791/59067-v

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09:51 min

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February 20, 2019

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, , , , ,
1Gunma University, 2JST PRESTO

Chapters

  • 00:04Title
  • 00:28Fabrication of the 3D Mesh Structure
  • 05:02Preparation of Substrate for Bonding Mesh Structure and Piezoelectric Film
  • 06:02Fabrication of Bimorph Vibration Energy Harvester (VEH)
  • 07:27Results: Observation and Evaluation of Fabricated Vibration Energy Harvester with Meshed-Core Structure
  • 09:02Conclusion

Summary

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Automatic Translation

In this study, we fabricated a flexible 3D mesh structure and applied it to the elastic layer of a bimorph cantilever-type vibration energy harvester for the purpose of lowering resonance frequency and increasing output power.

Tags

Polymer-basedPiezoelectricVibration Energy Harvester3D Meshed-core StructureFlexible Mesh StructureLow Frequency ApplicationsRF Magnetron SputteringChromium FilmPositive PhotoresistTMAH SolutionChromium EtchingAcrylic ResinNegative Photoresist SU-8

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