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Fabbricazione di bassa temperatura Nanotubi di carbonio interconnessioni verticali Compatibile con la tecnologia Semiconductor
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Fabbricazione di bassa temperatura Nanotubi di carbonio interconnessioni verticali Compatibile con la tecnologia Semiconductor

Article DOI: 10.3791/53260-v • 09:20 min • December 7th, 2015
December 7th, 2015 •
1, 1
1Department of Microelectronics, Delft University of Technology

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Ingegneria Numero 106 nanotubi di carbonio Chemical Vapor Deposition interconnessioni fabbricazione di semiconduttori catalizzatore circuiti integrati microscopia elettronica a scansione spettroscopia Raman caratterizzazione elettrica
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