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Micro-masonry for 3D Additive Micromanufacturing
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Micro-masonry for 3D Additive Micromanufacturing

Micro-masonry for 3D Additive Micromanufacturing

DOI:
10.3791/51974-v

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08:45 min

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August 01, 2014

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1Mechanical Science and Engineering,University of Illinois at Urbana-Champaign

Chapters

  • 00:05Title
  • 02:02Prepare Retrievable Donor Substrate
  • 04:04Printing and Bonding Process
  • 06:09Results: Microscale Structures and Devices Assembled by Micro-masonry
  • 07:48Conclusion

Summary

Automatic Translation

Automatic Translation

This paper introduces a 3D additive micromanufacturing strategy (termed ‘micro-masonry’) for the flexible fabrication of microelectromechanical system (MEMS) structures and devices. This approach involves transfer printing-based assembly of micro/nanoscale materials in conjunction with rapid thermal annealing-enabled material bonding techniques.

Tags

Micro-masonry3D Additive MicromanufacturingTransfer PrintingMicro/nanoscale MaterialsHeterogeneous Material IntegrationFlexible And Stretchable DevicesMEMSSurface Contact AreaMechanical BondingThermal And Electrical Connection

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