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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
 

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Article DOI: 10.3791/51251-v • 11:44 min • August 15th, 2014
August 15th, 2014 •
1, 2, 3, 1, 3
1Department of Electrical and Computer Engineering, University of California, Davis, 2Digital Light Projection (DLP) Technology Development, Texas Instruments, 3Birck Nanotechnology Center and the Department of Electrical and Computer Engineering, Purdue University

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The robust device design of fringing-field electrostatic MEMS actuators results in inherently low squeeze-film damping conditions and long settling times when performing switching operations using conventional step biasing. Real-time switching time improvement with DC-dynamic waveforms reduces the settling time of fringing-field MEMS actuators when transitioning between up-to-down and down-to-up states.

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Real-time DC-dynamic Biasing Switching Time Improvement Severely Underdamped Fringing-field Electrostatic MEMS Actuators Mechanical Quality Factors Transient Applied Bias Waveforms Underlying Substrate Removal Reliability Performance Failure Due To Stiction Settling Time Slew Rates Charge Pumps Fully-integrated On-chip Designs Back-end-of-line Commercial CMOS Processing Steps Experimental Validation
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