Lukasiewicz Research Network-Institute of Electronic Materials Technology 1 article published in JoVE Chemistry 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry Paweł Piotr Michałowski1, Sebastian Zlotnik1, Iwona Jóźwik1, Adrianna Chamryga1, Mariusz Rudziński1 1Łukasiewicz Research Network-Institute of Electronic Materials Technology The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.