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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Chapitres
- 00:00Titre
- 02:51Selecting and Designing Optimum Structure
- 03:31Modeling and Fabrication on CMOS
- 05:39Device Testing: Thermal Camera Test for Embedded Heaters
- 06:27Device Testing: Calibrating LDV and Test Setup
- 09:19Device Testing: Testing 68μm Long MEMS Filters via LDV
- 10:32Device Testing: Higher Mode Measurement
- 11:01Avoiding Device Failures
- 11:45Avoiding Failures: High Thermal Stress and Burning
- 12:10Boosting The Tuning Capability
- 13:16Résultats
- 14:07Conclusion
A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.
