/
/
Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
È necessario avere un abbonamento a JoVE per visualizzare questo. Accedi o inizia la tua prova gratuita.
Capitoli
- 00:05Titolo
- 01:30Substrate Preparation
- 02:01Laser Alignment and Selection of Laser Parameters
- 03:33Target Alignment, Pre-ablation and Data Collection for Plasma Plume Length Determination
- 04:51Calibration of the Film Thickness
- 05:58Deposition of Compact AZO Films
- 07:25Deposition of Hierarchically Structured AZO Films
- 08:08Results: Compact and Forest-like AZO Films and Their Properties
- 09:39Conclusion
We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.
