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Journal / Engineering / Micro-masonry for 3D Additive Micromanufacturing
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Engineering

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JoVE Journal Engineering
Micro-masonry for 3D Additive Micromanufacturing
 

Micro-masonry for 3D Additive Micromanufacturing

Article DOI: 10.3791/51974-v • 08:45 min • August 1st, 2014
August 1st, 2014 •
1, 1
1Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

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This paper introduces a 3D additive micromanufacturing strategy (termed ‘micro-masonry’) for the flexible fabrication of microelectromechanical system (MEMS) structures and devices. This approach involves transfer printing-based assembly of micro/nanoscale materials in conjunction with rapid thermal annealing-enabled material bonding techniques.

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Keywords: Micro-masonry 3D Additive Micromanufacturing Transfer Printing Micro/nanoscale Materials Heterogeneous Material Integration Flexible And Stretchable Devices MEMS Surface Contact Area Mechanical Bonding Thermal And Electrical Connection
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