/
/
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
È necessario avere un abbonamento a JoVE per visualizzare questo. Accedi o inizia la tua prova gratuita.
Capitoli
- 00:05Titolo
- 01:05Preparations
- 03:52Data Acquisition
- 05:38Data Analysis for Static Measurements
- 06:40Sample Preparation and Data Analysis for Dynamic Measurements
- 07:42Results: CDHM Compared to Atomic Force Microscopy and Other Results
- 09:17Conclusion
We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.
Tags
Compact Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationFull-field Optical MeasurementNon-contactReal-timeHigh-resolution3D MappingLens-lessCompactWafer InspectionMicro-opticsDiffractive OpticsBioimagingSilicon WaferGold Electrodes3D View SoftwareDMx 41BU02 CameraY800 Video FormatReflection Or Transmission Mode633 Nm Wavelength4.65 μm Pixel Size
