Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model

Thin films (100-1000 Å) of vanadium dioxide (VO₂) were created by atomic-layer deposition (ALD) on sapphire substrates. Following this, the optical properties were characterized through the metal-insulator transition of VO₂. From the measured optical properties, a model was created to describe the tunable refractive index of VO₂.