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Capitoli
- 00:04Introduction
- 01:12Substrate Selection, Preparation, and Floating Gates (FG): Titanium Deposition
- 02:11FG Patterning and Gate Dielectric Deposition
- 03:55Opening of the Sensing Areas of the OCMFET for Electrical Activity Recording and Formation of the Vias to Access the Back of the FGs
- 04:46Self-Alignment of Source and Drain with the FG
- 05:15Gold Deposition, Channel Formation, and Patterning of the Sources, Drains, and Control Gates
- 06:50Deposition and Activation of the Parylene C for pH Sensing
- 07:57Semiconductor Deposition, Culturing Chamber Placing, and Final Cut-Out of the Device from the PET
- 08:22Results: Cellular Electrical and Metabolic Activity Recordings with Micro OCMFET Arrays (MOA)
- 09:27Conclusion
Tags
Keywords: In VitroMultiparametricCellular AnalysisOrganic Charge-modulated Field-effect Transistor ArraysBiocompatibleMechanically CompliantLow CostElectrical ActivityMetabolic ActivityPersonalized MedicineNeurodegenerative DiseasesPET SubstrateTitanium DepositionPhotoresistSpin CoatingPhotolithographic MaskUV Exposure
