光子晶体慢光波导和腔体的制备与表征
Summary
使用的光子晶体慢光波导和腔体已被广泛采用的光电子社区，在许多不同的应用。因此这些器件的制备和表征的极大兴趣。本文概述了我们的制造技术和了两个光学特性方法，即：干涉（波导）和共振散射（蛀牙）。
Abstract
慢光一直在光电子社会关注的热点话题之一，在过去的十年中，无论是从基本面来看，在实际应用中取得了巨大的潜在产生极大的兴趣。慢光光子晶体波导，尤其是发挥了重要作用，并已成功用于光信号延迟1-4和加强两个线性的5-7和非线性设备。8-11
光子晶体腔缓慢光波导实现类似的效果，但超过减少带宽。这些空腔提供高Q-factor/volume比率，为实现光学12和电13泵浦超低阈值的激光器和非线性效应的增强。14-16此外，无源滤波器17和调制器18-19已经证明，表现出的超窄线宽，高光谱ŕ安格和记录值能耗低。
为了达到这些令人振奋的结果，一个强大的可重复的制造协议必须得到发展。在本文中，我们将在深入了解我们的制造协议，采用电子束光刻的光子晶体图案的定义和采用湿法和干法刻蚀技术。我们的优化的制造配方结果不遭受垂直光子晶体中的不对称性和表现出非常不错的边壁的粗糙度。我们将讨论蚀刻参数和在设备上的不利影响，他们可以有不同的结果，导致诊断的路由，可以采取类似问题来确定和消除。
评估慢光波导的关键是被动的传输特性和组指数谱。各种方法已被报道，最明显的解决的Fabry-Perot干涉条纹中的透射光谱20-21ð干涉测量技术。22日至25日在这里，我们描述了一个直接，宽带光谱干涉测量技术相结合的傅里叶变换分析。站出来为它的简单性和强大26我们的方法，我们可以描述一个访问波导的裸光子晶体与，而不需要片上的干扰分量，并且设置只包括一个Mach-Zehnder干涉仪，与没有必要为移动部件和延迟扫描。
当表征光子晶体空腔，涉及内部源21或外部波导直接耦合到腔27腔本身的性能的影响的技术，从而扭曲的测量。在这里，我们描述了一种新颖的和非侵入性技术，使得使用一个交叉偏振探测光束和被称为共振散射（RS），其中探针是满分的平面耦合到空腔通过客观。该技术是第一示范29特德·麦卡琴等28 Galli 等人进一步发展。
Protocol
免责声明：以下协议给出了一般的工艺流程，包括光子晶体波导和腔体的制备和表征技术。流进行优化的方法，对于特定的设备，在我们的实验室提供，和参数可能会有所不同，如果其他的试剂或设备使用。 1。样品制备样品劈开 – 以绝缘体上硅（SOI）晶片，并使用金刚石划线划伤从硅表面的边缘大约1-2毫米长的线，确保划痕在晶片的边缘上延伸。划痕?…
Representative Results
Fabricated samples Figure 1 shows a scanning electron microscope (SEM) image of an exposed and developed pattern in electron beam resist – it is evident from the “clean” edge between the resist and the silicon substrate that complete exposure/development has been accomplished. Exposure of dose test patterns, consisting of simple repeated shapes (in our case 50 × 50 μm squares), each with a differing base dose, are used to determine the correct dose factor and developmen…
Discussion
样品制备
我们的选择是由于同时分辨率高，耐蚀刻性电子束抗蚀剂（ 即番520A）。我们相信ZEP 520A由从架空实验室灯发射的UV光可能会受到影响，因此，我们建议将旋涂样品UV不透明的容器中，而将它们移动到另一个从一个实验室。
移动到定义的光子晶体图案，露出了样品之前，我们已经发现，使电子束光刻系统解决了至少一个小时后负荷减少误配准?…
Disclosures
The authors have nothing to disclose.
Acknowledgements
作者非常感谢利玛窦加利博士西蒙L. Portalupi博士从帕维亚大学和卢西奥C. Andreani教授的有益讨论相关的遥感技术和测量的执行。
Materials
| Name | Company | Catalogue number | Comments (optional) |
| Acetone | Fisher Scientific | A/0520/17 | CAUTION: flammable, use good ventilation and avoid all ignition sources. |
| Isopropanol | Fisher Scientific | P/7500/15 | CAUTION: flammable, use good ventilation and avoid all ignition sources. |
| Electron Beam resist | Marubeni Europe plc. | ZEP520A | CAUTION: flammable, harmful by inhalation, avoid contact with skin and eyes. |
| Xylene | Fisher Scientific | X/0100/17 | CAUTION: flammable and highly toxic, use good ventilation, avoid all ignition sources, avoid contact with skin and eyes. |
| Microposit S1818 G2 | Chestech Ltd. | 10277866 | CAUTION: flammable and causes irritation to eyes, nose and respiratory tract. |
| Microposit Developer MF-319 | Chestech Ltd. | 10058721 | CAUTION: alkaline liquid and can cause irritation to eyes, nose and respiratory tract. |
| Hydrofluoric Acid | Fisher Scientific | 22333-5000 | CAUTION: extremely corrosive, readily destroys tissue; handle with full personal protective equipment rated for HF. |
| Microposit 1165 Remover | Chestech Ltd. | 10058734 | CAUTION: flammable and causes irritation to eyes, nose and respiratory tract. |
| Sulphuric Acid | Fisher Scientific | S/9120/PB17 | CAUTION: corrosive and very toxic; handle with personal protective equipment and avoid inhalation of vapours or mists. |
| Hydrogen Peroxide | Fisher Scientific | BPE2633-500 | CAUTION: very hazardous in case of skin and eye contact; handle with personal protective equipment. |
| Equipment | |||
| Silicon-on-Insulator wafer | Soitec | G8P-110-01 | |
| Diamond Scribe | J & M Diamond Tool Inc. | HS-415 | |
| Microscope slides | Fisher Scientific | FB58622 | |
| Beakers | Fisher Scientific | FB33109 | |
| Tweezers | SPI Supplies | PT006-AB | |
| Ultrasonic Bath | Camlab | 1161436 | |
| Spin-Coater | Electronic Micro Systems Ltd. | EMS 4000 | |
| Pipette | Fisher Scientific | FB55343 | |
| E-beam Lithography System | Raith Gmbh | Raith 150 | |
| Reactive Ion Etching System | Proprietary In-house Designed | — | |
| UV Mask Aligner | Karl Suss | MJB-3 | |
| ASE source | Amonics | ALS-CL-15-B-FA | CAUTION: invisible IR radiation. |
| Single mode fibers | Thorlabs | P1-SMF28E-FC-2 | |
| 3 dB fiber splitters | Thorlabs | C-WD-AL-50-H-2210-35-FC/FC | |
| Aspheric lenses | New Focus | 5720-C | |
| XYZ stages | Melles Griot | 17AMB003/MD | |
| Polarizing beamsplitter cube | Thorlabs | PBS104 | |
| IR detector | New Focus | 2033 | |
| 100× Objective | Nikon | BD Plan 100x | |
| Oscilloscope | Tektronix | TDS1001B | |
| Optical Spectrum Analyzer | Advantest | Q8384 | |
| IR sensor card | Newport | F-IRC2 | |
| TLS source | Agilent | 81940A | CAUTION: invisible IR radiation. |
| IR Camera | Electrophysics | 7290A | |
| IR Detector | New Focus | 2153 | |
| Digital Multimeter | Agilent | 34401A | |
| Illumination | Stocker Yale | Lite Mite | |
| Monochromator | Spectral Products | DK480 | |
| Array Detector | Andor | DU490A-1.7 | |
| GIF Fiber | Thorlabs | 31L02 |
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Cite This Article
Reardon, C. P., Rey, I. H., Welna, K., O’Faolain, L., Krauss, T. F. Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities. J. Vis. Exp. (69), e50216, doi:10.3791/50216 (2012).