氮化钛涂层硅基板上金石榴石的生长
Summary
本研究提出了在氮化钛硅基板上合成金树突状纳米森林的可行方法。金树状纳米森林的厚度在合成反应后15分钟内呈线性增加。
Abstract
本研究采用大功率脉冲磁控溅射系统, 在硅 (Si) 晶片上涂覆扁平牢固的氮化钛 (TiN) 薄膜, 并采用含氟辅助电置换反应 (FAGR) 对金进行快速、简便的沉积。树状纳米森林 (Au Dnf) 在 TiN/Si 基板上。扫描电子显微镜 (SEM) 图像和 Tin/Dnfs/Tin/si 样品的能量色散 x 射线光谱模式验证了合成过程的准确控制。在本研究的反应条件下, Au Dnf 的厚度在反应15分钟内线性增加到5.10±0.20μm。因此, 所采用的合成方法是制备 au Dnfss/tinssi 复合材料的一种简便、快速的方法。
Introduction
金纳米粒子具有独特的光学特性和局部表面等离子体共振 (lspr), 具体取决于纳米粒子1、2、3、4的大小和形状。此外, 金纳米粒子还能显著增强等离子体光催化反应5。利用金纳米粒子堆放的树突状纳米森林由于其值得注意的具体表面积和强大的 lspr 增强6、7、8、9而受到相当大的关注 10,11,12, 13.
TiN 是一种极其坚硬的陶瓷材料, 具有显著的热稳定性、化学稳定性和机械稳定性。Tin 具有独特的光学特性, 可用于可访问近红外光 14, 15 的等离子体应用。研究表明, TiN 可以产生电磁场增强, 类似于 Au 纳米结构 16.演示了用于tin 基板的17或银17 或银18、19、20的沉积.然而, 很少对 Au/TiN 复合材料进行应用研究。Shiao 等人最近证明了 Au Dnfs/tyn 复合材料在光电化学细胞21和化学降解 22中的潜在应用。
Au 可以通过使用 FAGRR23 在tin 基板上合成。Au Dnf 在 TiN 上的沉积条件对应用性能至关重要。本研究考察了 Au Dnf 在 tin 涂层硅基板上的生长情况。
Protocol
1. 样品制备 采用大功率脉冲磁控溅射系统制备 TiN 基板 将4英寸 n 型硅晶片切割成2厘米 x2 厘米的样品。 用丙酮、异丙醇和去离子水清洗样品。 用 N2 喷雾干燥 5分钟。 将清洗后的硅样品放入样品支架中, 并将样品支架放入大功率脉冲磁控溅射 (Hpims) 室。 将直径为4英寸的钛靶在溅射阴极上。 使用机械泵和低温泵, 将室内…
Representative Results
图 1显示了 au Dnafs/tin/tinsi 样品制剂的图像。硅片是银白色的 (图 1a)。TiN/Si 为金黄色, 表面均匀 (图 1b), 表明硅片上的 tin 涂层均匀。由于 Au Dnf 的随机分布, au Dns\ tin si 呈黄褐色, 表面不那么均匀 (图 1c)。 图 2显示了?…
Discussion
本研究采用 FAGRR 对 TiN/Si 表面具有多种分支尺寸的 Au Dnf 进行了修饰。Au Dnf 的沉积可以通过颜色的显著变化直接识别。Tin/si 上的 Au Dnf 厚度在15分钟内增加到 5.10±0.20μm, 这种厚度的增加可以用以下线性方程表示: y = 0.20 t + 0.649,时间从1分钟到15分钟不等。
在 FAGRR 中, 金属沉积受溶液23的组成和 pH 值的影响。沉积速率随基板表面缺陷密度的增加而?…
Disclosures
The authors have nothing to disclose.
Acknowledgements
这项工作得到了台湾科技部的支持, 合同号最大为 105-2221-e-492-003-MY2, 并且最适合 107-2622-e-239-002-cc3。
Materials
| Acetone | Dinhaw Enterprise Co. Ltd.,Taipei, Taiwan | ||
| Isopropanol | Echo Chemical Co. Ltd., Miaoli, Taiwan | TG-078-000000-75NL | |
| Buffered Oxide Etch | Uni-onward Corp., Hsinchu, Taiwan | UR-BOE-1EA | |
| Chloroauric Acid | Alfa Aesar., Heysham, United Kingdom | 36400.03 | |
| N-Type Silicon Wafer | Summit-Tech Company, Hsinchu, Taiwan | ||
| High-Power Impulse Magnetron Sputtering System (HiPIMS) | Melec GmbH, Germany | SPIK2000A | |
| Scanning Electron Microscope (SEM) | JEOL, Japan | JSM-7800F | |
| Ion Sputter Coater | Hitachi, Japan | E-1030 | |
| X-Ray Diffractometer (XRD) | PANalytical, The Netherlands | X'Pert PRO MRD |
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Cite This Article
Shiao, M., Zeng, J., Huang, H. J., Liao, B., Tang, Y., Lin, Y. Growth of Gold Dendritic Nanoforests on Titanium Nitride-coated Silicon Substrates. J. Vis. Exp. (148), e59603, doi:10.3791/59603 (2019).