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Chapters
- 00:05Title
- 01:36Microsphere Fabrication
- 03:02Microtoroid Fabrication
- 05:27Results: Silica Ultra High Quality Factor Microresonators
- 07:24Conclusion
We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.
Tags
FabricationSilicaUltra High Quality FactorMicroresonatorsWhispering Gallery Resonant CavitiesPhoton Storage LifetimeQuality Factor (Q)Material LossesSilica MicrocavitiesPhoton LifetimesUltra-low-threshold MicrolasersThin FilmsCavity Quantum Electrodynamics StudiesMicrosphereMicrotoroidCarbon Dioxide Laser Reflow StepOptical FiberSilicon WaferLithographyEtching Steps
