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Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
 

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Article DOI: 10.3791/50216-v 11:08 min November 30th, 2012
November 30th, 2012

챕터

요약

Use of photonic crystal slow light waveguides and cavities has been widely adopted by the photonics community in many differing applications. Therefore fabrication and characterization of these devices are of great interest. This paper outlines our fabrication technique and two optical characterization methods, namely: interferometric (waveguides) and resonant scattering (cavities).

Tags

Keywords: Photonic Crystal Slow Light Waveguides Photonic Crystal Cavities Fabrication Characterization Electron-beam Lithography Etching Transmission Group Index Spectral Interferometry Fourier Transform Analysis Mach-Zehnder Interferometer
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