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Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
 

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

Article DOI: 10.3791/53861-v • 10:14 min • March 6th, 2016
March 6th, 2016 •
1,2, 1,2, 1,3, 1,2,3, 1,2,3
1NSF Research Triangle Materials Research Science and Engineering Center, Duke University, 2Department of Biomedical Engineering, Duke University, 3Department of Mechanical Engineering and Materials Science, Duke University

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Acoustofluidic devices use ultrasonic waves within microfluidic channels to manipulate, concentrate and isolate suspended micro and nanoscopic entities. This protocol describes the fabrication and operation of such a device supporting bulk acoustic standing waves to focus particles in a central streamline without the aid of sheath fluids.

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Keywords: Acoustofluidic Devices Bulk Acoustic Standing Waves Sheathless Particle Focusing Microfabrication Photolithography Deep Reactive Ion Etching Silicon Wafer Processing
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