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Journal / Engineering / 紫外发光二极管纳米图案蓝宝石基板的AlN薄膜的石墨烯辅助准范德瓦尔斯皮Taxy…
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紫外发光二极管纳米图案蓝宝石基板的AlN薄膜的石墨烯辅助准范德瓦尔斯皮Taxy
 
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紫外发光二极管纳米图案蓝宝石基板的AlN薄膜的石墨烯辅助准范德瓦尔斯皮Taxy

Article DOI: 10.3791/60167-v • 07:00 min • June 25th, 2020
June 25th, 2020 •
*1,2, *3, 1,2, 1,2, 2,4, 1,2, 5, 1,2
1State Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Science, 3Center for Nanochemistry (CNC), Beijing National Laboratory for Molecular Science, College of Chemistry and Molecular Engineering, Peking University, 4State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, 5Electron Microscopy Laboratory, School of Physics, Peking University
* These authors contributed equally

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요약
Automatic Translation

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提出了一种在纳米图案蓝宝石基材上生产高质量AlN薄膜的石墨烯辅助生长方案。

Tags

工程， 问题 160， 石墨烯， MOCVD， AlN， 紫外线发光二极管， 范德瓦尔斯外延， 纳米图案蓝宝石基板
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